Deep UV(DUV) Coating
Key working wavelength:
AR/ HR for 193nm
AR/ HR for 266nm
AR/HR for 355nm and Laser coating
Able to provide Customized coating for 193~355nm
Key coating materials:
HfO2, LaF2, Al2O2, SiO2, MgF2
Substrates:
Lens, prisms, windows etc.
Material: UV grade FS
Typical dimension: 2mm-150mm
193nm AR and HR coating | |
AR for 193nm (T>98.5% AOI:0°)
| HR for 193nm (R>96% AOI:0°)
|
HR coating for 266nm and 308nm | |
HR for 266nm (R>99.5%, AOI: 0°) | Laser coatings for 355nm
|
Laser coatings for 355nm | |
Absorption Test station for 355nm
| Absorption for HR coating at 355nm(<100ppm) internal test
|
LIDT test station for 355nm
| LIDT for HR coating at 355nm(>10J/cm² 10ns, 10Hz,sample tested by Spica)
|
Detail
