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Precision Optics Crystals Ferrule&Tubing Precision Glass Molding Assembly Passive Optics Coatings Product Catalog Download

Deep UV(DUV) Coating


Key working wavelength:

AR/ HR for 193nm

AR/ HR for 266nm

AR/HR for 355nm and Laser coating

Able to provide Customized coating for 193~355nm


Key coating materials:

HfO2, LaF2, Al2O2, SiO2, MgF2


Substrates:

Lens, prisms, windows etc.

Material: UV grade FS

Typical dimension: 2mm-150mm    

193nm AR and HR coating

AR for 193nm (T>98.5% AOI:0°)

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HR for 193nm (R>96% AOI:0°)

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HR coating for 266nm and 308nm

HR for 266nm (R>99.5%, AOI: 0°)    

  Coating-Deep UV(DUV) Coating4.png

Laser coatings for 355nm

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Laser coatings for 355nm

Absorption Test station for 355nm


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Absorption for HR coating at 355nm(<100ppm) internal test

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LIDT test station for 355nm


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LIDT for HR coating at 355nm(>10J/cm² 10ns,   10Hz,sample tested by Spica)

Coating-Deep UV(DUV) Coating9.png

                             

               

Product Catalog Download

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